Design of diaphragm structure for piezoresistive pressure sensor using topology optimization

Title
Design of diaphragm structure for piezoresistive pressure sensor using topology optimization
Authors
Keywords
MEMS, Topology optimization, Piezoresistive pressure sensor, High sensitivity, Linearity, Diaphragm
Journal
STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION
Volume 55, Issue 1, Pages 317-329
Publisher
Springer Nature
Online
2016-06-03
DOI
10.1007/s00158-016-1470-x

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