Design of diaphragm structure for piezoresistive pressure sensor using topology optimization

标题
Design of diaphragm structure for piezoresistive pressure sensor using topology optimization
作者
关键词
MEMS, Topology optimization, Piezoresistive pressure sensor, High sensitivity, Linearity, Diaphragm
出版物
STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION
Volume 55, Issue 1, Pages 317-329
出版商
Springer Nature
发表日期
2016-06-03
DOI
10.1007/s00158-016-1470-x

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