Ionic conductivity of bias sputtered lithium phosphorus oxy-nitride thin films

Title
Ionic conductivity of bias sputtered lithium phosphorus oxy-nitride thin films
Authors
Keywords
LiPON solid state electrolyte, XPS depth profiling, Ionic conductivity and its correlation, RF reactive sputter deposition, ICP/OES chemical analysis, Density of defects
Journal
SOLID STATE IONICS
Volume 287, Issue -, Pages 48-59
Publisher
Elsevier BV
Online
2016-02-28
DOI
10.1016/j.ssi.2016.01.046

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