Atmospheric pressure plasma enabled polishing of single crystal sapphire

Published 2015 View Full Article

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Title
Atmospheric pressure plasma enabled polishing of single crystal sapphire
Authors
Keywords
Surface, Polishing, Plasma
Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 64, Issue 1, Pages 515-518
Publisher
Elsevier BV
Online
2015-04-28
DOI
10.1016/j.cirp.2015.04.037

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