Atmospheric pressure plasma enabled polishing of single crystal sapphire

标题
Atmospheric pressure plasma enabled polishing of single crystal sapphire
作者
关键词
Surface, Polishing, Plasma
出版物
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 64, Issue 1, Pages 515-518
出版商
Elsevier BV
发表日期
2015-04-28
DOI
10.1016/j.cirp.2015.04.037

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