Micro thermal conductivity detector with flow compensation using a dual MEMS device

Published 2016 View Full Article

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Title
Micro thermal conductivity detector with flow compensation using a dual MEMS device
Authors
Keywords
Thermal conductivity detector, Flow compensation, Hydrogen sensor, Helium sensor, CO2 sensor, MEMS, TCD
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 249, Issue -, Pages 186-198
Publisher
Elsevier BV
Online
2016-08-26
DOI
10.1016/j.sna.2016.08.019

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