Micro thermal conductivity detector with flow compensation using a dual MEMS device

出版年份 2016 全文链接

标题

作者

关键词

Thermal conductivity detector, Flow compensation, Hydrogen sensor, Helium sensor, CO2 sensor, MEMS, TCD

出版物

Volume 249, Issue -, Pages 186-198

出版商

Elsevier BV

发表日期

2016-08-26

DOI

10.1016/j.sna.2016.08.019

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