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Title
Fabrication of iridium oxide neural electrodes at the wafer level
Authors
Keywords
reactive ion sputtering, iridium oxide, wafer-level, neural electrode
Journal
Science China-Technological Sciences
Volume 59, Issue 9, Pages 1399-1406
Publisher
Springer Nature
Online
2016-09-03
DOI
10.1007/s11431-016-6099-x
References
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