Fabrication of iridium oxide neural electrodes at the wafer level

标题
Fabrication of iridium oxide neural electrodes at the wafer level
作者
关键词
reactive ion sputtering, iridium oxide, wafer-level, neural electrode
出版物
Science China-Technological Sciences
Volume 59, Issue 9, Pages 1399-1406
出版商
Springer Nature
发表日期
2016-09-03
DOI
10.1007/s11431-016-6099-x

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