A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplification
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Title
A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplification
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 87, Issue 10, Pages 105006
Publisher
AIP Publishing
Online
2016-11-01
DOI
10.1063/1.4965880
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