A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplification
出版年份 2016 全文链接
标题
A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplification
作者
关键词
-
出版物
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 87, Issue 10, Pages 105006
出版商
AIP Publishing
发表日期
2016-11-01
DOI
10.1063/1.4965880
参考文献
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