A generic “micro-Stoney” method for the measurement of internal stress and elastic modulus of ultrathin films

Pushing the limits of acoustics at the nanoscale using femtosecond transient interferometry

(2014) A. Devos et al.   APPLIED PHYSICS LETTERS

Dynamic Analysis of Multi-Beam MEMS Structures for the Extraction of the Stress-Strain Response of Thin Films

(2012) S. Houri et al.   EXPERIMENTAL MECHANICS

Mechanical characterization of materials at small length scales

(2012) Maria F. Pantano et al.   Journal of Mechanical Science and Technology

On-chip stress relaxation testing method for freestanding thin film materials

(2012) M. Coulombier et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

A novel device for in-situ nanomechanics of 1-D nanostructures

(2011) Vikas Prakash et al.   JOM

On-chip tensile testing of nanoscale silicon free-standing beams

(2011) Umesh Bhaskar et al.   JOURNAL OF MATERIALS RESEARCH

Graphene Bimetallic-like Cantilevers: Probing Graphene/Substrate Interactions

(2011) Hiram Conley et al.   NANO LETTERS

Note: Fast and reliable fracture strain extraction technique applied to silicon at nanometer scale

(2011) Vikram Passi et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

What is the Young's Modulus of Silicon?

(2010) Matthew A. Hopcroft et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

On the use of a multiple beam optical sensor for in situ curvature monitoring in liquids

(2010) Q. Van Overmeere et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

High speed wafer scale bulge testing for the determination of thin film mechanical properties

(2010) M. P. Orthner et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

(2009) H. Sadeghian et al.   APPLIED PHYSICS LETTERS

Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

(2009) Han Li et al.   JOURNAL OF MATERIALS RESEARCH

New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films

(2009) S. Gravier et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

On the determination of Poisson’s ratio of stressed monolayer and bilayer submicron thick films

(2009) P. Martins et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Internal stress relaxation based method for elastic stiffness characterization of very thin films

(2009) A. Boé et al.   THIN SOLID FILMS

Stress and strain in titanium nitride thin films

(2009) R. Machunze et al.   THIN SOLID FILMS

Complete thin film mechanical characterization using picosecond ultrasonics and nanostructured transducers: experimental demonstration on SiO2

(2008) P. A. Mante et al.   APPLIED PHYSICS LETTERS

Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers

(2008) G.C.A.M. Janssen et al.   THIN SOLID FILMS

A further step towards an understanding of size-dependent crystal plasticity: In situ tension experiments of miniaturized single-crystal copper samples

(2007) D. Kiener et al.   ACTA MATERIALIA