Directed self-assembly of block copolymers on chemical patterns: A platform for nanofabrication

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Title
Directed self-assembly of block copolymers on chemical patterns: A platform for nanofabrication
Authors
Keywords
Directed self-assembly, Chemical pattern, Block copolymer lithography, Nanofabrication, Pattern transfer, Bit-patterned media
Journal
PROGRESS IN POLYMER SCIENCE
Volume 54-55, Issue -, Pages 76-127
Publisher
Elsevier BV
Online
2015-11-03
DOI
10.1016/j.progpolymsci.2015.10.006

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