Directed self-assembly of block copolymers on chemical patterns: A platform for nanofabrication

出版年份 2016 全文链接

标题

作者

关键词

Directed self-assembly, Chemical pattern, Block copolymer lithography, Nanofabrication, Pattern transfer, Bit-patterned media

出版物

Volume 54-55, Issue -, Pages 76-127

出版商

Elsevier BV

发表日期

2015-11-03

DOI

10.1016/j.progpolymsci.2015.10.006

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