Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge

Published 2016 View Full Article

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Title
Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge
Authors
Keywords
-
Journal
PLASMA SCIENCE & TECHNOLOGY
Volume 18, Issue 4, Pages 394-399
Publisher
IOP Publishing
Online
2016-04-06
DOI
10.1088/1009-0630/18/4/11

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