Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge

标题
Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge
作者
关键词
-
出版物
PLASMA SCIENCE & TECHNOLOGY
Volume 18, Issue 4, Pages 394-399
出版商
IOP Publishing
发表日期
2016-04-06
DOI
10.1088/1009-0630/18/4/11

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