Time-resolved study of pulsed Ar–N2and Ar–N2–H2microwave surfaguide discharges using optical emission spectroscopy

Published 2012 View Full Article

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Title
Time-resolved study of pulsed Ar–N2and Ar–N2–H2microwave surfaguide discharges using optical emission spectroscopy
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 21, Issue 3, Pages 035007
Publisher
IOP Publishing
Online
2012-05-24
DOI
10.1088/0963-0252/21/3/035007

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