The radio-frequency fluctuation effect on the floating harmonic method

RF compensation of double Langmuir probes: modelling and experiment

(2015) Juan F Caneses et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Investigation of plasma diagnostics using a dual frequency harmonic technique

(2014) Dong-Hwan Kim et al.   JOURNAL OF APPLIED PHYSICS

Non-invasive in situ plasma monitoring of reactive gases using the floating harmonic method for inductively coupled plasma etching application

(2013) J. H. Lee et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Real-time observation of the capacitance variation in a surface dielectric layer in radio frequency discharge

(2012) Jin-Young Bang et al.   JOURNAL OF APPLIED PHYSICS

Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

(2011) V A Godyak et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

A plasma diagnostic technique using a floating probe for the dielectric deposition process

(2011) Jin-Young Bang et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

In situ method for real time measurement of dielectric film thickness in plasmas

(2010)   JOURNAL OF APPLIED PHYSICS

Radio frequency-compensated Langmuir probe with auxiliary double probes

(2010) Se-Jin Oh et al.   REVIEW OF SCIENTIFIC INSTRUMENTS