In situ method for real time measurement of dielectric film thickness in plasmas

Published 2010 View Full Article

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Title
In situ method for real time measurement of dielectric film thickness in plasmas
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 2, Pages 023303
Publisher
AIP Publishing
Online
2010-01-26
DOI
10.1063/1.3267307

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