Journal
OPTIK
Volume 127, Issue 20, Pages 9896-9904Publisher
ELSEVIER GMBH
DOI: 10.1016/j.ijleo.2016.07.084
Keywords
decouple; current distribution coefficients; fine stage
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This paper presents a decouple control method based on optimization of current distribution coefficients to decrease the coupling effects caused by uncertain current distribution coefficients between multi-degrees of freedom, this method can applied to multi-input multi-output (MIMO) system like 6-DOF fine stage of lithographic equipment. The minimum square of residual error between the measured output and the estimated output is proposed as the objective based on the analytical model of the fine stage. The step experiments are carried out to verify the decoupling effectiveness for MIMO system. (C) 2016 Elsevier GmbH. All rights reserved.
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