Deposition of MnO Anode and MnO2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd)3 Precursor

Title
Deposition of MnO Anode and MnO2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd)3 Precursor
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 27, Issue 10, Pages 3628-3635
Publisher
American Chemical Society (ACS)
Online
2015-05-05
DOI
10.1021/acs.chemmater.5b00255

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