Deposition of MnO Anode and MnO2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd)3 Precursor

标题
Deposition of MnO Anode and MnO2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd)3 Precursor
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 27, Issue 10, Pages 3628-3635
出版商
American Chemical Society (ACS)
发表日期
2015-05-05
DOI
10.1021/acs.chemmater.5b00255

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