Enhanced electrical and optical properties of room temperature deposited Aluminium doped Zinc Oxide (AZO) thin films by excimer laser annealing

标题
Enhanced electrical and optical properties of room temperature deposited Aluminium doped Zinc Oxide (AZO) thin films by excimer laser annealing
作者
关键词
Transparent conductive oxide, Al-doped zinc oxide, RF-magnetron sputtering, Excimer laser annealing
出版物
OPTICS AND LASERS IN ENGINEERING
Volume 80, Issue -, Pages 45-51
出版商
Elsevier BV
发表日期
2016-01-14
DOI
10.1016/j.optlaseng.2015.12.010

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