Optimization of the depth resolution for deuterium depth profiling up to large depths

Published 2016 View Full Article

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Title
Optimization of the depth resolution for deuterium depth profiling up to large depths
Authors
Keywords
Deuterium depth profiling, Depth profiling, Ion beam analysis, D(, He,p), He, Depth resolution, Optimization of the depth resolution
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 387, Issue -, Pages 103-114
Publisher
Elsevier BV
Online
2016-10-15
DOI
10.1016/j.nimb.2016.09.004

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