Optimization of the depth resolution for deuterium depth profiling up to large depths

标题
Optimization of the depth resolution for deuterium depth profiling up to large depths
作者
关键词
Deuterium depth profiling, Depth profiling, Ion beam analysis, D(, He,p), He, Depth resolution, Optimization of the depth resolution
出版商
Elsevier BV
发表日期
2016-10-15
DOI
10.1016/j.nimb.2016.09.004

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