Role of Arsenic During Aluminum Droplet Etching of Nanoholes in AlGaAs

Title
Role of Arsenic During Aluminum Droplet Etching of Nanoholes in AlGaAs
Authors
Keywords
Semiconductor, Nanostructuring, Self-assembly, Droplet etching
Journal
Nanoscale Research Letters
Volume 11, Issue 1, Pages -
Publisher
Springer Nature
Online
2016-09-26
DOI
10.1186/s11671-016-1648-6

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