Reduction of the Pass Gate Effect with a Spherical Shallow Trench Isolation in the BCAT Structure

Published 2023 View Full Article

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Title
Reduction of the Pass Gate Effect with a Spherical Shallow Trench Isolation in the BCAT Structure
Authors
Keywords
-
Journal
Journal of Semiconductor Technology and Science
Volume 23, Issue 4, Pages 236-242
Publisher
The Institute of Electronics Engineers of Korea
Online
2023-09-01
DOI
10.5573/jsts.2023.23.4.236

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