Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor

Cobalt Metal ALD: Understanding the Mechanism and Role of Zinc Alkyl Precursors as Reductants for Low-Resistivity Co Thin Films

(2021) David Zanders et al.   CHEMISTRY OF MATERIALS

ALD growth of ultra-thin Co layers on the topological insulator Sb2Te3

(2020) Emanuele Longo et al.   Nano Research

Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor

(2019) Bao Zhu et al.   Nanoscale Research Letters

Status and prospects of plasma-assisted atomic layer deposition

(2019) Harm C. M. Knoops et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

The role of oxide formation on insulating versus metallic substrates during Co and Ru selective ALD

(2019) Steven Wolf et al.   APPLIED SURFACE SCIENCE

Plasma enhanced atomic layer deposition of Co thin film on τ-MnAl for effective magnetic exchange coupling and enhanced energy products

(2018) Junhua You et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review

(2018) Adriaan J. M. Mackus et al.   CHEMISTRY OF MATERIALS

Ambient-Pressure X-ray Photoelectron Spectroscopy Study of Cobalt Foil Model Catalyst under CO, H2, and Their Mixtures

(2017) Cheng Hao Wu et al.   ACS Catalysis

Low-temperature chemical vapor deposition of cobalt oxide thin films from a dicobaltatetrahedrane precursor

(2017) Marcel Melzer et al.   RSC Advances

Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating

(2014) Jae-Hyung Park et al.   SURFACE & COATINGS TECHNOLOGY

A cobalt layer deposition study: Dicobaltatetrahedranes as convenient MOCVD precursor systems

(2014) C. Georgi et al.   Journal of Materials Chemistry C

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Evaluating the Structure of Catalysts Using Core-Level Binding Energies Calculated from First Principles

(2012) Quang Thang Trinh et al.   Journal of Physical Chemistry C

Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Cr, Mn, Fe, Co and Ni

(2010) Mark C. Biesinger et al.   APPLIED SURFACE SCIENCE

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS