Measurement and reduction of Ar metastable densities by nitrogen admixing in electron beam-generated plasmas

Title
Measurement and reduction of Ar metastable densities by nitrogen admixing in electron beam-generated plasmas
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 32, Issue 11, Pages 115005
Publisher
IOP Publishing
Online
2023-10-27
DOI
10.1088/1361-6595/ad0741

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