Measurement and reduction of Ar metastable densities by nitrogen admixing in electron beam-generated plasmas

标题
Measurement and reduction of Ar metastable densities by nitrogen admixing in electron beam-generated plasmas
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 32, Issue 11, Pages 115005
出版商
IOP Publishing
发表日期
2023-10-27
DOI
10.1088/1361-6595/ad0741

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