Feasibility of determining electron energy distribution function using optical emission lines in low-pressure Ar/Kr discharge

Title
Feasibility of determining electron energy distribution function using optical emission lines in low-pressure Ar/Kr discharge
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2023-11-03
DOI
10.1088/1361-6595/ad0921

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