Feasibility of determining electron energy distribution function using optical emission lines in low-pressure Ar/Kr discharge

标题
Feasibility of determining electron energy distribution function using optical emission lines in low-pressure Ar/Kr discharge
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2023-11-03
DOI
10.1088/1361-6595/ad0921

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