Peripheral-photoinhibition-based direct laser writing with isotropic 30 nm feature size using a pseudo 3D hollow focus
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Title
Peripheral-photoinhibition-based direct laser writing with isotropic 30 nm feature size using a pseudo 3D hollow focus
Authors
Keywords
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Journal
OPTICS AND LASER TECHNOLOGY
Volume -, Issue -, Pages 110011
Publisher
Elsevier BV
Online
2023-09-29
DOI
10.1016/j.optlastec.2023.110011
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