The Materials Challenge in Diffraction-Unlimited Direct-Laser-Writing Optical Lithography

Published 2010 View Full Article

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Title
The Materials Challenge in Diffraction-Unlimited Direct-Laser-Writing Optical Lithography
Authors
Keywords
-
Journal
ADVANCED MATERIALS
Volume 22, Issue 32, Pages 3578-3582
Publisher
Wiley
Online
2010-07-02
DOI
10.1002/adma.201000892

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