Mitigating challenges in aberration-corrected electron-beam lithography on electron-opaque substrates

Published 2023 View Full Article

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Title
Mitigating challenges in aberration-corrected electron-beam lithography on electron-opaque substrates
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2023-11-03
DOI
10.1088/1361-6528/ad0908

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