A novel non-vacuum packaged triaxial accelerometer with differential dual-axis resonantors and torsional elements

A sensitive micromachined resonant accelerometer for moving-base gravimetry

(2021) Zhengxiang Fang et al.   SENSORS AND ACTUATORS A-PHYSICAL

Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer

(2019) Shengran Cai et al.   Micromachines

A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz1/2 Noise Floor

(2019) Chun Zhao et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Design and test of a micromachined resonant accelerometer with high scale factor and low noise

(2017) Yonggang Yin et al.   SENSORS AND ACTUATORS A-PHYSICAL

Non linear response and optimization of a new z-axis resonant micro-accelerometer

(2016) Claudia Comi et al.   MECHATRONICS

A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer

(2016) Akin Aydemir et al.   SENSORS AND ACTUATORS A-PHYSICAL

MEMS inertial sensors: A tutorial overview

(2013) Derek K. Shaeffer   IEEE COMMUNICATIONS MAGAZINE

High-performance monolithic triaxial piezoresistive shock accelerometers

(2007) Peitao Dong et al.   SENSORS AND ACTUATORS A-PHYSICAL