A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer

Published 2016 View Full Article

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Title
A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer
Authors
Keywords
Three-axis accelerometer, Out of plane accelerometer, Capacitive MEMS accelerometer, SOI
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 244, Issue -, Pages 324-333
Publisher
Elsevier BV
Online
2016-04-05
DOI
10.1016/j.sna.2016.04.007

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