Processing of PtSe2 ultra-thin layers using Ar plasma

Title
Processing of PtSe2 ultra-thin layers using Ar plasma
Authors
Keywords
-
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 167, Issue -, Pages 107814
Publisher
Elsevier BV
Online
2023-08-28
DOI
10.1016/j.mssp.2023.107814

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