CMOS- compatible fabrication method of graphene-based micro devices

Authors

Keywords

Graphene, Devices fabrications, Optical lithography, Magnetic field sensor

Journal

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Volume 67, Issue -, Pages 92-97

Publisher

Elsevier BV

Online

2017-05-20

DOI

10.1016/j.mssp.2017.05.021

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