Effect of nitrogen pressure on the fabrication of AlCrFeCoNiCu0.5 high entropy nitride thin films via cathodic arc deposition
Published 2023 View Full Article
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Title
Effect of nitrogen pressure on the fabrication of AlCrFeCoNiCu0.5 high entropy nitride thin films via cathodic arc deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 41, Issue 6, Pages -
Publisher
American Vacuum Society
Online
2023-10-31
DOI
10.1116/6.0003064
References
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