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Title
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 32, Issue 5, Pages 474-482
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2023-08-04
DOI
10.1109/jmems.2023.3298958
References
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