Perturbation analysis of nonlinear responses caused by transverse modes in AlN FBAR based on 2D scalar wave model

Published 2023 View Full Article

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Title
Perturbation analysis of nonlinear responses caused by transverse modes in AlN FBAR based on 2D scalar wave model
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2023-10-31
DOI
10.35848/1347-4065/ad07f9

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