Perturbation analysis of nonlinear responses caused by transverse modes in AlN FBAR based on 2D scalar wave model

标题
Perturbation analysis of nonlinear responses caused by transverse modes in AlN FBAR based on 2D scalar wave model
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2023-10-31
DOI
10.35848/1347-4065/ad07f9

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