Structural Investigation of AlN/SiOx Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering

Title
Structural Investigation of AlN/SiOx Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering
Authors
Keywords
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Journal
MICROSCOPY AND MICROANALYSIS
Volume 22, Issue 03, Pages 673-678
Publisher
Cambridge University Press (CUP)
Online
2016-04-12
DOI
10.1017/s1431927616000611

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