TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System

Published 2012 View Full Article

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Title
TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System
Authors
Keywords
-
Journal
MICROSCOPY AND MICROANALYSIS
Volume 18, Issue S2, Pages 1696-1697
Publisher
Cambridge University Press (CUP)
Online
2012-11-28
DOI
10.1017/s1431927612010331

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