Influence of gate oxides with high thermal conductivity on the failure distribution of InGaAs-based MOS stacks

Title
Influence of gate oxides with high thermal conductivity on the failure distribution of InGaAs-based MOS stacks
Authors
Keywords
Oxide breakdown, Progressive breakdown, High-k dielectrics, III–V MOS devices
Journal
MICROELECTRONICS RELIABILITY
Volume 56, Issue -, Pages 22-28
Publisher
Elsevier BV
Online
2015-10-21
DOI
10.1016/j.microrel.2015.10.009

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