A numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probes

Published 2016 View Full Article

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Title
A numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probes
Authors
Keywords
Finite element model (FEM), Cohesive zone model (CZM), Thin film, Fracture, Nano-indentation, Cube corner probe
Journal
MICROELECTRONIC ENGINEERING
Volume 156, Issue -, Pages 108-115
Publisher
Elsevier BV
Online
2016-01-12
DOI
10.1016/j.mee.2016.01.006

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