A numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probes

出版年份 2016 全文链接

标题

作者

关键词

Finite element model (FEM), Cohesive zone model (CZM), Thin film, Fracture, Nano-indentation, Cube corner probe

出版物

Volume 156, Issue -, Pages 108-115

出版商

Elsevier BV

发表日期

2016-01-12

DOI

10.1016/j.mee.2016.01.006

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