Hybrid simulation of the plasma characteristics in a dual‐frequency dual‐antenna inductively coupled plasma discharge

Effects of combined coils on the uniformity of RF ion source

(2022) Yongjie Hu et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Optimization of discharge antenna turn and modulation of EEPFs and plasma parameters in dual-frequency cylindrical ICP source at different gas pressures

(2020) Yue Hua et al.   JOURNAL OF APPLIED PHYSICS

A Simulation Study on Large-Area Inductively Coupled Plasma for Uniformity Optimization

(2020) Eui-Jeong Son et al.   Journal of Electrical Engineering & Technology

Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma

(2019) Xiao-Yan Sun et al.   PHYSICS OF PLASMAS

Simulation of a large size inductively coupled plasma generator and comparison with experimental data

(2018)   AIP Advances

Hybrid simulations of solenoidal radio-frequency inductively coupled hydrogen discharges at low pressures

(2016) Wei Yang et al.   PHYSICS OF PLASMAS

Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge

(2016) Xifeng Wang et al.   PLASMA SCIENCE & TECHNOLOGY

Inductively coupled plasma etching of tapered via in silicon for MEMS integration

(2015) Zhong Ren et al.   MICROELECTRONIC ENGINEERING

Characteristics of pulsed dual frequency inductively coupled plasma

(2014) Jin Seok Seo et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Modulation of electron energy distributions and discharge parameters in a dual frequency ICP discharge

(2013) Anurag Mishra et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Mass spectrometric study of discharges produced by a large-area dual-frequency–dual-antenna inductively coupled plasma source

(2012) Anurag Mishra et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Impact of Phase Shifted Coil Currents on Plasma Uniformity

(2011) Ankur Agarwal et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

High Density Plasma Etching of Platinum Films in BCl3/Ar and CF4/Ar Inductively Coupled Plasmas

(2010) Jong Cheon Park et al.   Electronic Materials Letters

Investigation of the effect of metastable atoms on mode transition in argon inductive discharge via a hybrid model

(2010) Shu-Xia Zhao et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model

(2009) Shu-Xia Zhao et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS