Hybrid simulation of the plasma characteristics in a dual‐frequency dual‐antenna inductively coupled plasma discharge

Title
Hybrid simulation of the plasma characteristics in a dual‐frequency dual‐antenna inductively coupled plasma discharge
Authors
Keywords
-
Journal
CONTRIBUTIONS TO PLASMA PHYSICS
Volume -, Issue -, Pages -
Publisher
Wiley
Online
2023-10-13
DOI
10.1002/ctpp.202300051

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