Hybrid simulation of the plasma characteristics in a dual‐frequency dual‐antenna inductively coupled plasma discharge
出版年份 2023 全文链接
标题
Hybrid simulation of the plasma characteristics in a dual‐frequency dual‐antenna inductively coupled plasma discharge
作者
关键词
-
出版物
CONTRIBUTIONS TO PLASMA PHYSICS
Volume -, Issue -, Pages -
出版商
Wiley
发表日期
2023-10-13
DOI
10.1002/ctpp.202300051
参考文献
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